The experimental set-up for C-V measurements consist of
The HP model 4192A LF Impedance
Analyser is a fully automatic, high performance test instrument designed to measure a wide range of impedance parameters as well as gain, phase, and group delay. The 4192A can provide measuring frequency, OSC level, and dc bias voltage(impedance measurements only).
The built-in frequency synthesizer can be set to measuring frequency within the range from 5.000Hz to 13.00000 MHz with 1mHz maximum resolution. OSC level os variable from 5mHz to 1.1Vrms with 1mV resolustion (5mV for levels higher than 100mV). The internal dc bias voltage source (impedance measurements only) provides +35~-35 in 10mV increments.
Parameters in impedace measurements:
- absolute value of impedance (|Z|)
- absolute value of admittance (|Y|)
- phase angle (thetha)
- resistance (R)
- reactance (X)
- conductance (G)
- susceptance ( B)
- inductance (L)
- capacitance (C)
- dissipation factor (D)
- quality factor (Q)
The Model 6000 probe station is the station used for probing up to 4" wafers or packaged parts.