Field emission scanning electron microscopy set up
The scanning electron microscopy is a versatile, non-destructive technique that reveals detailed information
about the morphology and the composition of natural and manufactured materials.
The SUPRA 40 (ZEISS) has been developed as an extremely versatile FESEM capable of delivering high quality imaging solutions for the many demanding applications in the field of nano technology.
- High stability
- A large (130 mm) fully motorised eucentric versatile specimen holder
- Column has an extremely low magnetic field outside the objective lens enabling investigation of
magnetic materials and devices.
- A field-emission cathode in the electron gun provides narrower probing beams at low as well as high electron energy,
resulting in both improved spatial resolution and minimized sample charging and damage.
- nominal resolution: 1.5 nm at 10 kV and working distance 2 mm
- acceleration voltage: 0.1 - 30 KV
- probe current: 4 pA-10 nA
- magnification: 12 - 900'000 X
- working distance: 1-50 mm, depending on the operating conditions
- sample holder can host nine stubs, each of which can hold a sample of about 1 cm2.
Energy Dispersive X-rays detector
OXFORD INCA ENERGY 450 is a microanalysis system which represents one of the state-of-the-art system for elemental and phase analysis, enabling fast, accurate spectra gathering, multiple line scans and elemental mapping.
- Liquid-nitrogen cooled Si(Li) detector
- New FET design, based on patented PentaFET® technology,
which guarantees an output from the detector stable with count rate.
- Thermally cyclable so the detector only needs to be cooled when necessary.
- 10 mm2 Si(Li) INCA x-sight “Premium” detector with guaranteed resolution of
133 eV @ (MnKα), 70 eV @ (FKα), 66 eV @ (CKα)
- INCA SATW window for light elements
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