Materials and Processes for Micro & Nano Technologies

Characterizations

Set-up for I(V) measurement

The experimental set-up for I-V measurements consist of

The main topics related to this study are:

• Source-Measure Unit 237 (Keithley)
• Source-Measure Unit 238 (Keithley)
• MM Micromanipulator
• Tektronik Curve Tracer
• Automatic system data acquistion

Source-Measure Unit 237-

Key Features and Benefits:

• Four instruments in one (voltage source-measure, current source-measure)
• 10fA / 10microV measurement sensitivity
• 1100V source and measure (237 only)
• 1A source and measure (238 only)
• Standard and custom sweep capability including pulse
• 1000 source/measurements per second for high throughput
• Four quadrant source operation to handle the widest range of tests
• Internal 1000-reading memory

MM Micromanipulator

The Model 6000 probe station is the station used for probing up to 4" wafers or packaged parts.

TEKTRONIX TYPE 576 CURVE-TRACER