Materials and Processes for Micro & Nano Technologies
Characterizations
Profiler
(P-10 Surface Profiler in our clean room)
This system is a computerized, highly sensitive, surface profiler that measures roughness, waviness, step height, and other surface characteristics in a variety of applications.
Main features
- micro-roughness measurement with up to 0.5 Angstrom resolution over short distances
- waviness measurement over a full 205 mm scan
- automatic measurement capability
- software for control and data analysis
- vertical range for the optional Low-Force MicroHead II is under 50 Angstrom to 130 micron and 1 Angstrom vertical data resolution
- measurement of 130 mm disk substrates and 205 mm (8 in.) substrates
