Materials and Processes for Micro & Nano Technologies

Growth Systems

Electron-Beam Evaporator System - EBX-14D

---

---

The electron beam system, as a vacuum evaporation source for high rate deposition of pure material and simple deposition of high meltimg point material, is a powerful upgrade of thermal evaporators.
A quartz-based thickness/rate monitor system (STM-100/MF) is implemented in the chamber.

Ultimate pressure	Pumpdown time	Vacuum chamber	Remarks
3x10-7Torr	To 3x10-6Torr 25 minutes	750F x 800H (Stainless)	Automatic control Diffusion pump applied E/B, Layer

Product	Application	Film material
IC/LSI/VLSI	Conductor and electrode	Ni, Ag, Au-Ge, Ti-Ag-Au, Al, Al-Si, Al-Si-Cu, Mo, Mo-Si2, W-Si, Ti-Pt-Au, W-Au, Mo-Au, Cr-Cu-Au
	Wafer rearside coating	Au, Ni, Ni-Au, Au-Si, Cr-Ni, Cr-Ni-Au, Cr-Cu-Au, Ti-Au
	Electrode	Pb-Sn, Pb-In
Hybrid IC	Cunductor	Cr-Cu, Cr-Au
	Condensor	SiO, SiO2, Al2O3, Ta2O5, TiO2
	Resistor	Ta, Ta2N, Ta-Al-N, Ta-Si, Cr-SiO, NiCr, SnO2, TiCr
Solar cell	Electrode	Al, Ti-Ag
	Reflactive protector	SiO2, SiO
Thermal head	Resistor	Si-Ta, Ta2Ni, NiCr, Ta-SiO2
	Electrode	Cr-Cu, NiCr-Au, Al