Electron Microscopy 2
ZEISS Merlin
nominal resolution: 0.8 nm at 15 kV
acceleration voltage: 0.1 - 30 KV
probe current: 4 pA-10 nA
magnification: 12 – 2’000'000 X
CZ BSD detector for BE
EDS microanalysis (Oxford N2 free )
STEM module (best resolution 0.6 nm @ 30 kV)