ZEISS Merlin

nominal resolution: 0.8 nm at 15 kV

acceleration voltage: 0.1 - 30 KV

probe current: 4 pA-10 nA

magnification: 12 – 2’000'000 X

CZ BSD detector for BE

EDS microanalysis (Oxford N2 free )

STEM module (best resolution 0.6 nm @ 30 kV)