COATING SYSTEM TYPE PARYLENE P6 DIENER

System Description:

• Deposited materials: parylene N, C, (D), F-VT4
• Range of thickness: max. 30 micrometers
• Chamber: Ø ca. 200 mm; height: ca. 200 mm
• Carrousel: Ø ca. 170 mm; height: ca. 170 mm
• Pyrolysis: 1,6 kW / max. 750 °C
• Cold trap: Liquid N2
• Ultimate pressure: 1 x 10-3 mbar
• Two modes:
  • manual operation: manual operation of the system by on-screen clicking
  • automatic operation: automatic operation of a programmed process
• Parameter: base pressure, maximum pump down time, process pressure
• Data archive saves data and parameters of processes in automatic operation.