Tencor P-10 Surface Profiler
The profiler (hosted in a class 1000 cleanroom) is a computerized, highly sensitive surface profiler that measures roughness, waviness, step height, and other surface characteristics in a variety of applications over a full 205 mm scan.
The built-in PC computing power offers precise, automatic measurement capability with the convenience and ease of use of Microsoft windows-based software control and data analysis.
• Vertical range = 160 µm and 1 Å vertical data resolution.
• Measurement 205 mm (8 in.) substrates.