Systems for Thin-film Growth and Surface Treatments
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LPCVD
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Furnace System
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Thermal & E-Gun Evaporation
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Sputtering
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PZT sol-gel
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Rapid Thermal Annealing (RTA)
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Electroplating
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Low Pressure Plasma Polymerization System
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ECR/RF PECVD deposition system
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RF Magnetron sputtering (monotarget)
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Atmospheric Pressure Plasma System
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Single-layer Graphene growth
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Atomic Layer Deposition (ALD)
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ICPCVD
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Parylene Deposition