Atmospheric Pressure Plasma System
Atmospheric Pressure Plasma System (Arioli SPA)
- Dielectric Barrier Discharge
- Radio Frequency Generator 30-50 kHz
- Maximum Power 2 kW
- 2 Multi-electrode tools composed by 10 bars: 1-stainless steel; 2-ceramics
- Gas delivery system (Ar)
- Liquid delivery system => Thermal chamber for Vapors delivery => carrier gas mixing (e.g., HDMSO) => Polymerization
- Aspirator 250-600m3/h
- Surface of treatment: 250mm x 600mm
An Example of Process:
- RF Power = 1100 W
- Ceramic multi-electrode tool
- Specific Power Applied = 0.6875 MW/m2
- Ar flow = 10 l/min
- Electrode line speed= 5m/min
- Number of passes= 5 passes