The CANTIRED is a semi-automatic platform for the characterization of mechanical vibrating structures such as microcantilevers, bridges and membranes. The characterization tool allows the loading in the vacuum chamber up to 9 devices and automatic serial measurement after a pre-positioning software. The MEMS structure is actuated thanks to a piezo-disk and the vibration amplitude and phase are recorded with the optical-lever method. The amplitude signal is then fitted by the dedicated software to evaluate the resonant frequency and quality factor of the device. The characterization platform was designed and fabricated in collaboration with Microla – Optoelectronics.