Low Pressure Plasma Polymerization System
Plasma Polymerization system characteristics (IONVAC Process s.r.l.)
The plasma polymerization deposition system allows the deposition of a wide range of polymer-like functional films which chemical composition depends on the liquid monomer precursors: Acrylic Acid; Styrene; DiethyleneGlycoleDimethylEther; organosilanes; organosiloxanes; etc.
Available gas lines and vapour/gas delivery
- Ar, N2, O2
- 3 heated reservoirs (bubblers) for liquid reactants (quartz-stainless steel junction)
- 2 horizontal parallel plates of 15 cm in diameter are:
- upper showerhead electrode
- lower grounded electrode (sample holder)
Pumping system
- oil-free mechanical pump
- ultimate vacuum: 10-2 Torr
Plasma generation
- pulsed discharge (equipped with a function generator
- radio frequency (13.56 MHz) capacitive discharge
- maximum r. f. power: 300 W