Laser Doppler Vibrometer (LDV)

The Laser Doppler Vibrometer (Polytec MSA-500 Micro System Analyzer) is a fully integrated optical measurement workstation for characterizing out-of-plane vibrations and surface topography of micro and nanostructures. LDV represents a fundamental tool for the characterization of microgravimetric chemical and biological sensors as well as the evaluation of nanomechanical devices.

The instrument is capable of evaluate out-of-plane deformation and vibration modes, with sub-picometer amplitude resolutions and at frequencies up to 20MHz. From the measurement of the deformation in different points of the device, the LDV is able to reconstruct a 3D map of the vibration of the structure.

In addition the instrument has integrated a white-light interferometer for surface topography measurements providing 3D surface recontstruction with sub-nanometer resolution in the z axis.